Ken Soon Neo

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Full Name

Ken Soon Neo

Variants

Neo, K.S.

Main Affiliation

MECHANICAL ENGINEERING
COLLEGE OF DESIGN AND ENGINEERING

Faculty

FAC OF ENGINEERING
COLLEGE OF DESIGN & ENG

mpeneoks@nus.edu.sg

Refined By:

Type: Conference Paper

Subject: Diamond tool

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		Issue Date	Title	Author(s)
	1	22-Sep-2003	Nano-precision measurement of diamond tool edge radius for wafer fabrication	Li, X.P. ; Rahman, M. ; Liu, K. ; Neo, K.S. ; Chan, C.C.