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Li Wenshen
rp03639
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Full Name
Li Wenshen
Variants
Li, W.S.
Main Affiliation
PHYSICS
Faculty
FAC OF SCIENCE
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Author
1
Chan, L.H.
1
Chen, S.Y.
1
Li, W.S.
1
See, A.K.
1
Shen, Z.X.
.
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Department
1
INSTITUTE OF ENGINEERING SCIENCE
1
PHYSICS
Subject
1
C40 TiSi2
1
Laser thermal processing (LTP)
Type
1
Conference Paper
Date Issued
1
2002
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Subject:
0.1 μm technology
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Issue Date
Title
Author(s)
1
2002
Synthesis of pure C40 TiSi2 for Si wafer fabrication
Chen, S.Y.
;
Shen, Z.X.
;
Xu, S.Y.
;
See, A.K.
;
Chan, L.H.
;
Li, W.S.
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