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Sridhar, Uppili
rp01780
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Full Name
Sridhar, Uppili
Variants
SRIDHAR, UPPILI
Sridhar, U.
Main Affiliation
INSTITUTE OF MICROELECTRONICS
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NON-NUS ORGANISATIONS
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Department
1
INSTITUTE OF MICROELECTRONICS
Type
1
Patent
File Format
1
Adobe PDF
Policy
1
Open
Date Issued
1
1990 - 1999
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Issue Date
Title
Author(s)
1
27-Jul-1999
Isolation process for surface micromachined sensors and actuators
SRIDHAR, UPPILI
;
JUN, LIU LIAN
;
DOW, FOO PANG
;
HONG, LO YONG
;
BO, MAIO YU
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