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Weng Khuen Ho

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Full Name
Weng Khuen Ho
Variants
Ho, W.-K.
Ho, Weng-Khuen
Khuen, Ho Weng
Ho, M.
Ho, Weng Khuen
Khuen Ho, W.
Ho, W.Y.
Khuen, H.W.
Ho, W.K.
 
Main Affiliation
 
Faculty
 
Email
elehowk@nus.edu.sg
 

Publications

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Type:  Conference Paper

Results 1-20 of 47 (Search time: 0.006 seconds).

Issue DateTitleAuthor(s)
12000A benchtop plant for evaluation of flexible structure control methodologiesBin, L.; Ho, W.K. ; Lim, K.W. ; Sin, K.K. 
22007A distributed co-evolutionary particle Swarm Optimization AlgorithmLiu, D.S.; Tan, K.C. ; Ho, W.K. 
32004A novel wafer baking system using hot air streamsLan, W.; Loong, C.S.; Poh, L.A. ; Ming, G.Z.; Wan, T.W. ; Tay, A. ; Khuen, H.W. 
42008CD uniformity control via real-time control of photoresist propertiesChen, M.; Fu, J. ; Ho, W.K. ; Tay, A. 
52007Clustering intelligent sensor nodes for distributed fault detection & diagnosisJoe, Y.Y.; Ho, W.K. ; Lim, K.W. ; Ding, Z.Q.; Zhang, J.B.; Ling, K.V.; Romagnoli, J.A.
61993Comparison of two design methods for PID controllersHang, C.C. ; Ho, W.K. ; Cao, L.S.
72002Control and signal processing for photoresist processing in microlithographyTay, A. ; Ho, W.K. ; Lim, K.W. ; Loh, A.P. ; Tan, W.W. 
81999Control of an integrated bake/chill systemLoh, A.P. ; Huang, A. ; Tan, W.W. ; Lim, K.W. ; Ho, W.K. 
92004Detection of Wafer warpages during thermal processing in microlithographyHo, W.K. ; Tay, A. ; Zhou, Y.; Yang, K.; Hu, N.
102012Development of in-situ real-time CD monitoring and control system through PEB processYang, G.; Tay, A. ; Ho, W.K. 
112000Diagnosability of faults using finite-state automaton modelXi, YunXia; Lim, Khiang-Wee ; Ho, Weng-Khuen ; Preisig, Heinz A.
122009Experimental evaluation of multiplexed MPC for semiconductor manufacturingLing, K.V.; Ho, W.K. ; Wu, B.; Aribowo, A.G.; Feng, Y.; Yan, H.
132004Fault detection and estimation of wafer warpage profile during thermal processing in microlithographyTay, A. ; Ho, W.K. ; Hu, N.; Zhou, Y.
142001Fault diagnosis using dynamic finite-state automaton modelsXi, Y.-X.; Lim, K.-W. ; Ho, W.-K. ; Preisig, H.A.
151999Fault-detection and diagnosis scheme by dynamic computation of finite-state automaton tablesRamkumar, K.B.; Druckenmueller, M.; Xi, Y.X.; Philips, P.; Presig, H.A.; Ho, W.K. ; Lim, K.W. 
161999Fault-detection and diagnosis scheme by dynamic computation of finite-state automaton tablesRamkumar, K.B.; Druckenmueller, M.; Xi, Y.X.; Philips, P.; Presig, H.A.; Ho, W.K. ; Lim, K.W. 
17Aug-2004In situ fault detection of wafer warpage in microlithographyHo, W.K. ; Tay, A. ; Zhou, Y.; Yang, K.
182005In-situ fault detection of wafer warpage in lithographyTay, A. ; Ho, W.K. ; Yap, C. ; Wei, C.; Tsai, K.-Y.
192005In-situ measurement & control of photoresist development in microlithographyKiew, C.M.; Tay, A. ; Ho, W.K. ; Lim, K.W. ; Zhou, Y.
202004In-situ measurement and control for photoresist processing in microlithographyTay, A. ; Ho, W.-K. ; Wu, X.; Kiew, C.-M.