Skip navigation
IVLE
Email
Library
Map
Calendar
Home
Research Outputs
View research outputs
Deposit publication / dataset
Researchers
Help
FAQs
Contact us
Guidelines
Log in
ScholarBank@NUS
Research Outputs
Browsing by Author
Zhou, M.S.
Enter a last name
Select a letter below to browse by last name or type
0-9
A
B
C
D
E
F
G
H
I
J
K
L
M
N
O
P
Q
R
S
T
U
V
W
X
Y
Z
Or
Results/Page
5
10
15
20
25
30
35
40
45
50
55
60
65
70
75
80
85
90
95
100
Showing results 1 to 6 of 6
Refman
EndNote
Bibtex
RefWorks
Excel
CSV
PDF
Send via email
Issue Date
Title
Author(s)
1998
Characterisation of metal pattern density and metal stack composition on chlorine residues from the metal etch process
Loong, S.Y.
;
Lee, H.K.
;
Zhou, M.S.
;
Chan, L.H.
;
Premachandran, V.
1997
Characterization of polymer formation during SiO2 etching with different fluorocarbon gases (CHF3, CF4, C 4F8)
Loong, S.Y.
;
Lee, H.K.
;
Chan, L.
;
Zhou, M.S.
;
Loh, F.C.
;
Tan, K.L.
Mar-2002
Effects of post-deposition anneal on the electrical properties of Si3N4 gate dielectric
Lin, W.H.
;
Pey, K.L.
;
Dong, Z.
;
Chooi, S.Y.-M.
;
Zhou, M.S.
;
Ang, T.C.
;
Ang, C.H.
;
Lau, W.S.
;
Ye, J.H.
Apr-2002
Impacts of buffer oxide layer in nitride/oxide stack gate dielectrics on the device performance and dielectric reliability
Lin, W.H.
;
Pey, K.L.
;
Dong, Z.
;
Lim, V.S.K.
;
Chooi, S.Y.M.
;
Zhou, M.S.
;
Ang, C.H.
;
Ang, T.C.
;
Lau, W.S.
1-Feb-1998
Laser cleaning of etch-induced polymers from via holes
Lu, Y.F.
;
Lee, Y.P.
;
Zhou, M.S.
1998
Steam laser cleaning of plasma-etch-induced polymers from via holes
Lee, Y.P.
;
Lu, Y.F.
;
Chan, D.S.H.
;
Low, T.S.
;
Zhou, M.S.