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Browsing by Author Zhou, M.S.

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	Issue Date	Title	Author(s)
	1998	Characterisation of metal pattern density and metal stack composition on chlorine residues from the metal etch process	Loong, S.Y.; Lee, H.K. ; Zhou, M.S.; Chan, L.H.; Premachandran, V.
	1997	Characterization of polymer formation during SiO2 etching with different fluorocarbon gases (CHF3, CF4, C 4F8)	Loong, S.Y.; Lee, H.K. ; Chan, L.; Zhou, M.S.; Loh, F.C. ; Tan, K.L.
	Mar-2002	Effects of post-deposition anneal on the electrical properties of Si3N4 gate dielectric	Lin, W.H.; Pey, K.L. ; Dong, Z.; Chooi, S.Y.-M.; Zhou, M.S.; Ang, T.C.; Ang, C.H.; Lau, W.S.; Ye, J.H.
	Apr-2002	Impacts of buffer oxide layer in nitride/oxide stack gate dielectrics on the device performance and dielectric reliability	Lin, W.H.; Pey, K.L. ; Dong, Z.; Lim, V.S.K.; Chooi, S.Y.M.; Zhou, M.S.; Ang, C.H.; Ang, T.C.; Lau, W.S.
	1-Feb-1998	Laser cleaning of etch-induced polymers from via holes	Lu, Y.F. ; Lee, Y.P.; Zhou, M.S.
	1998	Steam laser cleaning of plasma-etch-induced polymers from via holes	Lee, Y.P.; Lu, Y.F. ; Chan, D.S.H. ; Low, T.S. ; Zhou, M.S.

Showing results 1 to 6 of 6