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Yoong, H.
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Issue Date
Title
Author(s)
1-Jun-2000
Structural characterization of rapid thermally oxidized silicon-germanium-carbon alloy films
Choi, W.K.
;
Bera, L.K.
;
Chen, J.H.
;
Feng, W.
;
Pey, K.L.
;
Yoong, H.
;
Mi, J.
;
Zhang, F.
;
Yang, C.Y.