Browsing by Author Won Jong Yoo

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Issue DateTitleAuthor(s)
2001In-line plasma induced charging monitor for 0.15μm polysilicon gate etchingChong, D.; Won Jong Yoo; Ting Cheong Ang; Sang Yee Loong; Cha, R.; Pin Hian Lee; Layadi, N.; Chan, L.; See, A.