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Setiawan, Y.
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Showing results 1 to 4 of 4
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Issue Date
Title
Author(s)
2007
Effect of low fluence laser annealing on ultrathin Lu2 O3 high- k dielectric
Darmawan, P.
;
Lee, P.S.
;
Setiawan, Y.
;
Ma, J.
;
Osipowicz, T.
2007
Formation of silicided hyper-shallow p+/n- junctions by pulsed laser annealing
Pey, K.L.
;
Ong, K.K.
;
Lee, P.S.
;
Setiawan, Y.
;
Wang, X.C.
;
Wee, A.T.S.
;
Lim, G.C.
2008
Lu2O3/Al2O gate dielectrics for germanium metal-oxide-semiconductor devices
Darmawan, P.
;
Chan, M.Y.
;
Zhang, T.
;
Setiawan, Y.
;
Seng, H.L.
;
Chan, T.K.
;
Osipowicz, T.
;
Lee, P.S.
2007
Thermal stability of rare-earth based ultrathin Lu2 O3 for high- k dielectrics
Darmawan, P.
;
Lee, P.S.
;
Setiawan, Y.
;
Lai, J.C.
;
Yang, P.