Skip navigation
IVLE
Email
Library
Map
Calendar
Home
Research Outputs
View research outputs
Deposit publication / dataset
Researchers
Help
FAQs
Contact us
Guidelines
Log in
ScholarBank@NUS
Research Outputs
Browsing by Author
Fan, M.H.
Enter a last name
Select a letter below to browse by last name or type
0-9
A
B
C
D
E
F
G
H
I
J
K
L
M
N
O
P
Q
R
S
T
U
V
W
X
Y
Z
Or
Results/Page
5
10
15
20
25
30
35
40
45
50
55
60
65
70
75
80
85
90
95
100
Showing results 1 to 3 of 3
Refman
EndNote
Bibtex
RefWorks
Excel
CSV
PDF
Send via email
Issue Date
Title
Author(s)
1998
Elimination of 'bottom pinching' effect in environmentally stable chemically amplified resist
Soo, C.P.
;
Fan, M.H.
;
Bourdillon, A.J.
;
Chan, L.
1999
Enhancement or reduction of catalytic dissolution reaction in chemically amplified resists by substrate contaminants
Soo, C.P.
;
Valiyaveettil, S.
;
Huan, A.
;
Wee, A.
;
Ang, T.C.
;
Fan, M.H.
;
Bourdillon, A.J.
;
Chan, L.H.
Jul-1999
Improvement on lithography pattern profile by plasma treatment
Soo, C.P.
;
Bourdillon, A.J.
;
Valiyaveettil, S.
;
Huan, A.
;
Wee, A.
;
Fan, M.H.
;
Ang, T.C.
;
Chan, L.H.
