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El-Awady, K.
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Showing results 1 to 2 of 2
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Issue Date
Title
Author(s)
Feb-2005
Characterizing photolithographic linewidth sensitivity to process temperature variations for advanced resists using a thermal array
Schaper, C.D.
;
El-Awady, K.
;
Kailath, T.
;
Tay, A.
;
Lee, L.L.
;
Ho, W.K.
;
Fuller, S.E.
Jan-2004
Processing chemically amplified resists on advanced photomasks using a thermal array
Schaper, C.D.
;
El-Awady, K.
;
Kailath, T.
;
Tay, A.
;
Lee, L.L.
;
Ho, W.-K.
;
Fuller, S.E.
