Browsing by Author Dai, J.Y.

Showing results 1 to 8 of 8
Issue DateTitleAuthor(s)
Sep-2002Effect of ion implantation on layer inversion of Ni silicided poly-SiLee, P.S.; Pey, K.L. ; Mangelinck, D.; Ding, J. ; Chi, D.Z.; Osipowicz, T. ; Dai, J.Y.; Chan, L.
Aug-2003Effects of first rapid thermal annealing temperature on Co silicide formationPeng, H.J.; Shen, Z.X. ; Lim, E.H.; Lai, C.W.; Liu, R. ; Wee, A.T.S. ; Sameer, A.; Dai, J.Y.; Zhang, B.C.; Zheng, J.Z.
Jan-2002Enhanced stability of Ni monosilicide on MOSFETs poly-Si gate stackLee, P.S.; Mangelinck, D.; Pey, K.L. ; Ding, J. ; Chi, D.Z.; Osipowicz, T. ; Dai, J.Y.; See, A.
1999Formation and stability of Ni(Pt) silicide on(100)Si and (111)SiMangelinck, D.; Dai, J.Y.; Lahiri, S.K.; Ho, C.S.; Osipowicz, T. 
Jun-2000Integrity of copper-tantalum nitride metallization under different ambient conditionsYap, K.P.; Gong, H. ; Dai, J.Y.; Osipowicz, T. ; Chan, L.H.; Lahiri, S.K.
Dec-2001Nickel silicide formation on Si(100) and poly-Si with a presilicide N2 + implantationLee, P.S.; Mangelinck, D.; Pey, K.L. ; Ding, J. ; Chi, D.Z.; Dai, J.Y.; See, A. 
5-Jun-2000Nickel-platinum alloy monosilicidation-induced defects in n-type siliconChi, D.Z.; Mangelinck, D.; Dai, J.Y.; Lahiri, S.K.; Pey, K.L. ; Ho, C.S.
Jun-2002Phase and layer stability of Ni- and Ni(Pt)-silicides on narrow poly-Si linesLee, P.S.; Pey, K.L. ; Mangelinck, D.; Ding, J. ; Chi, D.Z.; Dai, J.Y.; Chan, L.