Browsing by Author Chen, S.Y.

Showing results 1 to 10 of 10
Issue DateTitleAuthor(s)
Mar-2003Applications of micro-Raman spectroscopy in salicide characterization for Si device fabricationZhao, F.F.; Chen, S.Y.; Shen, Z.X. ; Gao, X.S. ; Zheng, J.Z.; See, A.K.; Chan, L.H.
2001Direct formation of C54 phase on the basis of C40 TiSi2 and its applications in deep sub-micron technologyChen, S.Y.; Shen, Z.X. ; Xu, S.Y. ; See, A.K. ; Chan, L.H.; Li, W.S. 
2001Enhancement Effect of C40 TiSi2 on the C54 Phase FormationChen, S.Y.; Shen, Z.X. ; See, A.K.; Chan, L.H.
Nov-2002Excimer laser-induced Ti silicidation to eliminate the fine-line effect for integrated circuit device fabricationChen, S.Y.; Shen, Z.X. ; Xu, S.Y. ; Ong, C.K. ; See, A.K.; Chan, L.H.
18-Jun-2001Identification of refractory-metal-free C40 TiSi2 for low temperature C54 TiSi2 formationLi, K.; Chen, S.Y.; Shen, Z.X. 
20-Sep-1999Laser-induced direct formation of C54 TiSi2 films with fine grains on c-Si substratesChen, S.Y.; Shen, Z.X. ; Chen, Z.D.; Chan, L.H.; See, A.K.
1999Laser-induced formation of titanium silicidesChen, S.Y.; Shen, Z.X. ; Chen, Z.D.; See, A.K.; Chan, L.H.; Zhang, T.J.; Tee, K.C.
25-Dec-2000Synthesis and characterization of pure C40 TiSi2Chen, S.Y.; Shen, Z.X. ; Li, K.; See, A.K.; Chan, L.H.
2002Synthesis of pure C40 TiSi2 for Si wafer fabricationChen, S.Y.; Shen, Z.X. ; Xu, S.Y. ; See, A.K. ; Chan, L.H.; Li, W.S. 
1-Jan-2014Therapeutic target database update 2014: A resource for targeted therapeuticsQin, C.; Zhang, C.; Zhu, F.; Xu, F.; Chen, S.Y.; Zhang, P.; Li, Y.H.; Yang, S.Y.; Wei, Y.Q.; Tao, L.; Chen, Y.Z.