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Browsing by Author Bhat, M.

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	Issue Date	Title	Author(s)
	2004	Boron profile narrowing in laser-processed silicon after rapid thermal anneal	Poon, C.H.; Tan, L.S. ; Cho, B.J. ; See, A.; Bhat, M.
	Sep-2004	Electrical evaluation of laser annealed junctions by Hall measurements	Poon, C.H.; Tan, L.S. ; Cho, B.J. ; Ng, K.T.; Bhat, M.; Chan, L.
	2004	Multiple-pulse laser annealing of boron-implanted preamorphized silicon and the process optimization	Cho, B.J. ; Poon, D.; Tan, L.S. ; Bhat, M.; See, A.
	Mar-2003	Multiple-pulse laser annealing of preamorphized silicon for ultrashallow boron junction formation	Poon, C.H.; Cho, B.J. ; Lu, Y.F. ; Bhat, M.; See, A.
	2003	Process optimization for multiple-pulses laser annealing for boron implanted silicon with germanium pre-amorphization	Poon, D.; Cho, B.J. ; Lu, Y.F. ; Tan, L.S. ; Bhat, M.; See, A.
	Aug-2010	Pulsed laser annealing of ultra-shallow junctions in silicon-germanium	Tan, L.S. ; Tan, J.Y.; Begum, A.; Hong, M.H. ; Du, A.Y.; Bhat, M.; Wang, X.C.

Showing results 1 to 6 of 6