Browsing by Author Tee, K.C.

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Issue DateTitleAuthor(s)
2004Uniform void-free epitaxial CoSi 2 formation on STI bounded narrow Si(lOO) lines by template layer stress reductionHo, C.S.; Pey, K.L.; Tung, C.H.; Zhang, B.C.; Tee, K.C.; Karunasiri, G. ; Chua, S.J.