Browsing by Author Kiew, C.M.

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Showing results 3 to 4 of 4 < previous 
Issue DateTitleAuthor(s)
23-May-2007Optimal feed-forward control for multizone baking in microlithographyHo, W.K. ; Tay, A. ; Chen, M.; Kiew, C.M.
2006Robust real-time thin film thickness estimationKiew, C.M.; Tay, A. ; Ho, W.K. ; Lim, K.W. ; Lee, J.H.