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Research Outputs
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Sane, Vinay
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Showing results 3 to 5 of 5
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Issue Date
Title
Author(s)
1995
Quantitative imaging of local defects in very thin silicon dioxide films at low bias voltage by true oxide electron-beam-induced current
Lau, W.S.
;
Chan, D.S.H.
;
Phang, J.C.H.
;
Chow, K.W.
;
Pey, K.S.
;
Lim, Y.P.
;
Sane, V.
;
Cronquist, B.
1995
Quantitative imaging of local defects in very thin silicon dioxide films at low bias voltage by true oxide electron-beam-induced current
Lau, W.S.
;
Chan, D.S.H.
;
Phang, J.C.H.
;
Chow, K.W.
;
Pey, K.S.
;
Lim, Y.P.
;
Sane, V.
;
Cronquist, B.
1995
Two types of local oxide/substrate defects in very thin silicon dioxide films on silicon
Lau, W.S.
;
Sane, V.
;
Pey, K.S.
;
Cronquist, B.