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Issue Date	Title	Author(s)
Feb-2007	Temperature control and in situ fault detection of wafer warpage	Ho, W.K. ; Yap, C. ; Tay, A. ; Chen, W.; Zhou, Y.; Tan, W.W. ; Chen, M.
2004	Temperature control and in-situ fault detection of wafer warpage	Ho, W.K. ; Yap, C. ; Tay, A. ; Chen, W.; Lim, K.W.
Mar-2003	The intelligent alarm management system	Liu, J. ; Lim, K.W. ; Ho, W.K. ; Tan, K.C. ; Srinivasan, R. ; Tay, A.
Mar-2003	The intelligent alarm management system	Liu, J. ; Lim, K.W. ; Ho, W.K. ; Tan, K.C. ; Srinivasan, R. ; Tay, A.
2010	Timing performance oriented Optical proximity correction for mask cost reduction	Qu, Y.; Teh, S.H.; Heng, C.H. ; Tay, A. ; Lee, T.H.
Nov-2005	Using the OPC standard for real-time process monitoring and control	Liu, J.; Lim, K.W.; Ho, W.K. ; Tan, K.C. ; Tay, A. ; Srinivasan, R.
Nov-2005	Using the OPC standard for real-time process monitoring and control	Liu, J.; Lim, K.W.; Ho, W.K. ; Tan, K.C. ; Tay, A. ; Srinivasan, R.
2003	Warpage Detection during Baking of Semiconductor substrate in Microlithography	Ho, W.K. ; Tay, A. ; Lim, K.W. ; Zhou, Y.; Yang, K.

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