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TAY EE BENG,ARTHUR
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Showing results 94 to 113 of 120
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Issue Date
Title
Author(s)
2013
RBF-based compensation method on displacement and thermal error
Tan, K.K.
;
Yang, R.
;
Er, P.V.
;
Tay, A.
;
Teo, C.S.
2005
Real-time control of photoresist absorption coefficient uniformity
Tay, A.
;
Ho, W.-K.
;
Wu, X.
;
Tsai, K.-Y.
2005
Real-time control of photoresist development process
Tay, A.
;
Ho, W.-K.
;
Kiew, C.-M.
;
Zhou, Y.
;
Lee, J.H.
Jan-2007
Real-time control of photoresist extinction coefficient uniformity in the microlithography process
Tay, A.
;
Ho, W.K.
;
Wu, X.
2008
Real-time estimation and control of CD uniformity in lithography
Tay, A.
2007
Real-time estimation and control of photoresist properties in microlithography
Wu, X.
;
Tay, A.
;
Ho, W.K.
;
Tan, K.K.
2006
Real-time monitoring of photoresist thickness contour in microlithography
Ho, W.K.
;
Chen, X.
;
Wu, X.
;
Tay, A.
2007
Real-time spatial control of photoresist development rate
Tay, A.
;
Ho, W.-K.
;
Hu, N.
;
Kiew, C.-M.
;
Tsai, K.-Y.
2006
Real-time spatial control of steady-state wafer temperature during thermal processing in microlithography
Tay, A.
;
Ho, W.-K.
;
Hu, N.
;
Tsai, K.-Y.
;
Zhou, Y.
2018
Regression analysis of gait parameters and mobility measures in a healthy cohort for subject-specific normative values
Mikos V.
;
Yen S.-C.
;
Tay A.
;
Heng C.-H.
;
Chung C.L.H.
;
Liew S.H.X.
;
Tan D.M.L.
;
Au W.L.
Aug-2002
Resist film uniformity in the microlithography process
Ho, W.K.
;
Lee, L.L.
;
Tay, A.
;
Schaper, C.
2006
Robust real-time thin film thickness estimation
Kiew, C.M.
;
Tay, A.
;
Ho, W.K.
;
Lim, K.W.
;
Lee, J.H.
2002
Run-to-run process control for chemical mechanical polishing in semiconductor manufacturing
Da, L.
;
Kumar, V.G.
;
Tay, A.
;
Al Mamun, A.
;
Ho, W.K.
;
See, A.
;
Chan, L.
20-Oct-2004
Searching oligo sets of human chromosome 12 using evolutionary strategies
Joe, Y.-Y.
;
Tay, A.
;
Dong, Z.-Y.
;
Ng, H.-H.
;
Xu, H.
May-2006
Simple tilt and height location monitoring of wafers
Ng, T.W.
;
Tay, A.
;
Ong, C.J.
2015
Singapore Tele-technology Aided Rehabilitation in Stroke (STARS) trial: Protocol of a randomized clinical trial on tele-rehabilitation for stroke patients
Koh G.C.-H.
;
Yen S.C.
;
Tay A.
;
Cheong A.
;
Ng Y.S.
;
De Silva D.A.
;
Png C.
;
Caves K.
;
Koh K.
;
Kumar Y.
;
Phan S.W.
;
Tai B.C.
;
Chen C.
;
Chew E.
;
Chao Z.
;
Chua C.E.
;
Koh Y.S.
;
Hoenig H.
2001
Spatially-programmable thermal processing module for 300 mm wafer processing
Tay, A.
;
Khiang Wee Lim
;
Ai Poh Loh
;
Woei Wan Tan
;
Weng Khuen Ho
;
Huang, A.
;
Fu, J.
15-Jan-2009
Spot focus size effect in spectroscopic ellipsometry of thin films
Ng, T.W.
;
Tay, A.
;
Wang, Y.
2013
Study of web guide slippage phenomena in roll-to-roll embossing syste
Tan, H.
;
Wenjing, M.
;
Binglu, D.
;
Loong, C.S.
;
Meng, K.C.
;
Tay, A.
Feb-2007
Temperature control and in situ fault detection of wafer warpage
Ho, W.K.
;
Yap, C.
;
Tay, A.
;
Chen, W.
;
Zhou, Y.
;
Tan, W.W.
;
Chen, M.