Browsing by Author TAY EE BENG,ARTHUR

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Issue DateTitleAuthor(s)
1996Performance and gain and phase margins of well-known PID tuning formulasHo, W.K. ; Gan, O.P.; Tay, E.B. ; Ang, E.L.
1996Performance and gain and phase margins of well-known PID tuning formulasHo, W.K. ; Gan, O.P.; Tay, E.B. ; Ang, E.L.
Jan-2010Performance-based optical proximity correction methodologyTeh, S.-H.; Heng, C.-H. ; Tay, A. 
2007Piezo-assisted intra-cytoplasmic sperm injection: A comparative study of two penetration techniquesPutra, A.S. ; Huang, S. ; Tan, K.K. ; Panda, S.K. ; Lee, T.H. ; Tay, A. ; Ng, S.C. 
2009Predictive ratio control for interacting processesTan, K.K. ; Tay, A. ; Shao, Z. ; Huang, S. ; Lee, T.H. 
Jan-2004Processing chemically amplified resists on advanced photomasks using a thermal arraySchaper, C.D.; El-Awady, K.; Kailath, T.; Tay, A. ; Lee, L.L.; Ho, W.-K. ; Fuller, S.E.
Jun-2009Public goods provision: An evolutionary game theoretic study under asymmetric informationQuek, H.-Y.; Tan, K.C. ; Tay, A. 
2013RBF-based compensation method on displacement and thermal errorTan, K.K. ; Yang, R. ; Er, P.V.; Tay, A. ; Teo, C.S.
2005Real-time control of photoresist absorption coefficient uniformityTay, A. ; Ho, W.-K. ; Wu, X.; Tsai, K.-Y.
2005Real-time control of photoresist development processTay, A. ; Ho, W.-K. ; Kiew, C.-M.; Zhou, Y.; Lee, J.H.
Jan-2007Real-time control of photoresist extinction coefficient uniformity in the microlithography processTay, A. ; Ho, W.K. ; Wu, X.
2008Real-time estimation and control of CD uniformity in lithographyTay, A. 
2007Real-time estimation and control of photoresist properties in microlithographyWu, X.; Tay, A. ; Ho, W.K. ; Tan, K.K. 
2006Real-time monitoring of photoresist thickness contour in microlithographyHo, W.K. ; Chen, X.; Wu, X.; Tay, A. 
2007Real-time spatial control of photoresist development rateTay, A. ; Ho, W.-K. ; Hu, N.; Kiew, C.-M.; Tsai, K.-Y.
2006Real-time spatial control of steady-state wafer temperature during thermal processing in microlithographyTay, A. ; Ho, W.-K. ; Hu, N.; Tsai, K.-Y.; Zhou, Y.
2018Regression analysis of gait parameters and mobility measures in a healthy cohort for subject-specific normative valuesMikos V. ; Yen S.-C. ; Tay A. ; Heng C.-H. ; Chung C.L.H.; Liew S.H.X.; Tan D.M.L. ; Au W.L. 
Aug-2002Resist film uniformity in the microlithography processHo, W.K. ; Lee, L.L.; Tay, A. ; Schaper, C.
2006Robust real-time thin film thickness estimationKiew, C.M.; Tay, A. ; Ho, W.K. ; Lim, K.W. ; Lee, J.H.
2002Run-to-run process control for chemical mechanical polishing in semiconductor manufacturingDa, L.; Kumar, V.G.; Tay, A. ; Al Mamun, A. ; Ho, W.K. ; See, A.; Chan, L.