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TAY EE BENG,ARTHUR
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Showing results 66 to 85 of 120
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Issue Date
Title
Author(s)
Jan-2013
Method for real-time critical dimensions signature monitoring and control: Sensor, actuator, and experimental results
Ngo, Y.S.
;
Ang, K.T.
;
Tay, A.
Nov-2001
Minimum time control of conductive heating systems for microelectronics processing
Tay, A.
;
Ho, W.K.
;
Poh, Y.P.
2000
Minimum-time optimal feedforward control of conductive heating systems for microelectronics processing of silicon wafers and quatz photomasks
Ho, W.K.
;
Tay, A.
2000
Minimum-time optimal feedforward control of conductive heating systems for microelectronics processing of silicon wafers and quatz photomasks
Ho, W.K.
;
Tay, A.
2002
Mining multiple comprehensible classification rules using genetic programming
Tan, K.C.
;
Tay, A.
;
Lee, T.H.
;
Heng, C.M.
2008
Mobile real-time feedback system for education
Tan, K.K.
;
Tay, E.B.
;
Ong, K.C.
;
Leong, C.-Y.
3-Apr-2013
Modeling and real-time control of multizone thermal processing system for photoresist processing
Tay, A.
;
Chua, H.T.
;
Yuheng, W.
;
Geng, Y.
;
Khuen, H.W.
2010
Monitoring and control of photoresist properties and CD during photoresist processing
Yang, G.
;
Ngo, Y.-S.
;
Putra, A.S.
;
Ang, K.-T.
;
Tay, A.
;
Fang, Z.-P.
2010
Monitoring and control of photoresist properties and CD during photoresist processing
Yang, G.
;
Ngo, Y.-S.
;
Putra, A.S.
;
Ang, K.-T.
;
Tay, A.
;
Fang, Z.-P.
2009
Neural network versus behavior based approach in simulated car racing game
Tang, H.
;
Tan, C.H.
;
Tan, K.C.
;
Tay, A.
Feb-2014
Note: Real time three-dimensional topography measurement of microfluidic devices with pillar structures using confocal microscope
Ang, K.T.
;
Fang, Z.P.
;
Tay, A.
Jul-2004
On control of resist film uniformity in the microlithography process
Ho, W.K.
;
Tay, A.
;
Lee, L.L.
;
Schaper, C.D.
2008
Online adaptive controller for simulated car racing
Tan, C.H.
;
Ang, J.H.
;
Tan, K.C.
;
Tay, A.
2013
OPC mask simplification using over-designed timing slack of standard cells
Qu, Y.
;
Heng, C.H.
;
Tay, A.
;
Lee, T.H.
1999
Optimal control of conductive heating systems for microelectronics processing of silicon wafers and quartz photomasks
Ho, Weng Khuen
;
Tay, Arthur
;
Schaper, Charles D.
1999
Optimal control of conductive heating systems for microelectronics processing of silicon wafers and quartz photomasks
Ho, Weng Khuen
;
Tay, Arthur
;
Schaper, Charles D.
1999
Optimal control strategy using linear programming for load disturbance compensation in thermal processing systems
Ho, Weng Khuen
;
Tay, Arthur
;
Schaper, Charles D.
1999
Optimal control strategy using linear programming for load disturbance compensation in thermal processing systems
Ho, Weng Khuen
;
Tay, Arthur
;
Schaper, Charles D.
23-May-2007
Optimal feed-forward control for multizone baking in microlithography
Ho, W.K.
;
Tay, A.
;
Chen, M.
;
Kiew, C.M.
2000
Optimal predictive control with constraints for the processing of semiconductor wafers on bake plates
Ho, W.K.
;
Tay, A.
;
Schaper, C.D.