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Browsing by Author TAY EE BENG,ARTHUR

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Showing results 66 to 85 of 120 < previous   next >
Issue DateTitleAuthor(s)
Jan-2013Method for real-time critical dimensions signature monitoring and control: Sensor, actuator, and experimental resultsNgo, Y.S.; Ang, K.T.; Tay, A. 
Nov-2001Minimum time control of conductive heating systems for microelectronics processingTay, A. ; Ho, W.K. ; Poh, Y.P.
2000Minimum-time optimal feedforward control of conductive heating systems for microelectronics processing of silicon wafers and quatz photomasksHo, W.K. ; Tay, A. 
2000Minimum-time optimal feedforward control of conductive heating systems for microelectronics processing of silicon wafers and quatz photomasksHo, W.K. ; Tay, A. 
2002Mining multiple comprehensible classification rules using genetic programmingTan, K.C. ; Tay, A. ; Lee, T.H. ; Heng, C.M.
2008Mobile real-time feedback system for educationTan, K.K. ; Tay, E.B. ; Ong, K.C.; Leong, C.-Y.
3-Apr-2013Modeling and real-time control of multizone thermal processing system for photoresist processingTay, A. ; Chua, H.T.; Yuheng, W.; Geng, Y.; Khuen, H.W. 
2010Monitoring and control of photoresist properties and CD during photoresist processingYang, G.; Ngo, Y.-S.; Putra, A.S. ; Ang, K.-T.; Tay, A. ; Fang, Z.-P.
2010Monitoring and control of photoresist properties and CD during photoresist processingYang, G.; Ngo, Y.-S.; Putra, A.S. ; Ang, K.-T.; Tay, A. ; Fang, Z.-P.
2009Neural network versus behavior based approach in simulated car racing gameTang, H.; Tan, C.H.; Tan, K.C. ; Tay, A. 
Feb-2014Note: Real time three-dimensional topography measurement of microfluidic devices with pillar structures using confocal microscopeAng, K.T.; Fang, Z.P.; Tay, A. 
Jul-2004On control of resist film uniformity in the microlithography processHo, W.K. ; Tay, A. ; Lee, L.L.; Schaper, C.D.
2008Online adaptive controller for simulated car racingTan, C.H.; Ang, J.H.; Tan, K.C. ; Tay, A. 
2013OPC mask simplification using over-designed timing slack of standard cellsQu, Y.; Heng, C.H. ; Tay, A. ; Lee, T.H. 
1999Optimal control of conductive heating systems for microelectronics processing of silicon wafers and quartz photomasksHo, Weng Khuen ; Tay, Arthur ; Schaper, Charles D.
1999Optimal control of conductive heating systems for microelectronics processing of silicon wafers and quartz photomasksHo, Weng Khuen ; Tay, Arthur ; Schaper, Charles D.
1999Optimal control strategy using linear programming for load disturbance compensation in thermal processing systemsHo, Weng Khuen ; Tay, Arthur ; Schaper, Charles D.
1999Optimal control strategy using linear programming for load disturbance compensation in thermal processing systemsHo, Weng Khuen ; Tay, Arthur ; Schaper, Charles D.
23-May-2007Optimal feed-forward control for multizone baking in microlithographyHo, W.K. ; Tay, A. ; Chen, M.; Kiew, C.M.
2000Optimal predictive control with constraints for the processing of semiconductor wafers on bake platesHo, W.K. ; Tay, A. ; Schaper, C.D.
Showing results 66 to 85 of 120 < previous   next >