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TAY EE BENG,ARTHUR
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Showing results 47 to 66 of 120
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Issue Date
Title
Author(s)
Aug-2004
In situ fault detection of wafer warpage in microlithography
Ho, W.K.
;
Tay, A.
;
Zhou, Y.
;
Yang, K.
1-Nov-2006
In situ measurement of wafer temperature using two sensors with different dynamical properties
Tan, W.W.
;
Tang, J.C.
;
Loh, A.P.
;
Tay, A.
Dec-2009
In situ monitoring of photoresist thickness uniformity of a rotating wafer in lithography
Tay, A.
;
Ho, W.K.
;
Wu, X.
;
Chen, X.
2012
In-situ critical dimension control during post-exposure bake with spectroscopic ellipsometry
Ngo, Y.S.
;
Qu, Y.
;
Tay, A.
;
Lee, T.H.
2005
In-situ fault detection of wafer warpage in lithography
Tay, A.
;
Ho, W.K.
;
Yap, C.
;
Wei, C.
;
Tsai, K.-Y.
2005
In-situ measurement & control of photoresist development in microlithography
Kiew, C.M.
;
Tay, A.
;
Ho, W.K.
;
Lim, K.W.
;
Zhou, Y.
2005
In-situ measurement & control of photoresist development in microlithography
Kiew, C.M.
;
Tay, A.
;
Ho, W.K.
;
Lim, K.W.
;
Zhou, Y.
2004
In-situ measurement and control for photoresist processing in microlithography
Tay, A.
;
Ho, W.-K.
;
Wu, X.
;
Kiew, C.-M.
2009
In-situ monitoring and control of photoresist parameters during thermal processing in the lithography sequence
Wu, X.
;
Yang, G.
;
Lim, E.-X.
;
Tay, A.
2007
In-situ monitoring of photoresist thickness contour
Ho, W.K.
;
Wu, X.
;
Tay, A.
;
Chen, X.
2008
In-situ real-time temperature control of baking systems in lithography
Wang, Y.
;
Chua, H.-T.
;
Tay, A.
2007
Influence of wafer warpage on photoresist film thickness and extinction coefficient measurements
Wu, X.
;
Tay, A.
May-2004
Integrated bake/chill module with in situ temperature measurement for photoresist processing
Tay, A.
;
Ho, W.-K.
;
Loh, A.-P.
;
Lim, K.-W.
;
Tan, W.-W.
;
Schaper, C.D.
2009
Integrated bake/chill system for across-wafer temperature uniformity control in photoresist processing
Chua, H.T.
;
Tay, A.
;
Wang, Y.
2005
Integrated metrology and processes for semiconductor manufacturing
Ho, W.K.
;
Tay, A.
;
Lim, K.W.
;
Loh, A.P.
;
Tan, W.W.
2011
Iterative feedback tuning of optical proximity correction mask in lithography
Qu, Y.
;
Tay, A.
;
Lee, T.H.
Jul-1998
Knowledge-based multivariable PID control
Ho, W.K.
;
Lee, T.H.
;
Tay, E.B.
Jul-1998
Knowledge-based multivariable PID control
Ho, W.K.
;
Lee, T.H.
;
Tay, E.B.
2010
Library-based performance-based OPC
Teh, S.-H.
;
Heng, C.-H.
;
Tay, A.
Jan-2013
Method for real-time critical dimensions signature monitoring and control: Sensor, actuator, and experimental results
Ngo, Y.S.
;
Ang, K.T.
;
Tay, A.