Browsing by Author TAY EE BENG,ARTHUR

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Issue DateTitleAuthor(s)
2008CD uniformity control via real-time control of photoresist propertiesChen, M.; Fu, J. ; Ho, W.K. ; Tay, A. 
Feb-2005Characterizing photolithographic linewidth sensitivity to process temperature variations for advanced resists using a thermal arraySchaper, C.D.; El-Awady, K.; Kailath, T.; Tay, A. ; Lee, L.L.; Ho, W.K. ; Fuller, S.E.
2005Combined data reconciliation and parameter estimationThian, B.S.; Joe, Y.Y.; Tay, A. ; Doan, X.-T.
Jul-2010Computationally efficient behaviour based controller for real time car racing simulationTan, C.H.; Tan, K.C. ; Tay, A. 
Feb-2004Constraint feedforward control for thermal processing of quartz photomasks in microelectronics manufacturingTay, A. ; Ho, W.K. ; Schaper, C.D.; Lee, L.L.
2002Control and signal processing for photoresist processing in microlithographyTay, A. ; Ho, W.K. ; Lim, K.W. ; Loh, A.P. ; Tan, W.W. 
15-Jan-2006Control of photoresist film thickness: Iterative feedback tuning approachTay, A. ; Khuen Ho, W. ; Deng, J.; Keng Lok, B.
2003Control of Photoresist Thickness Uniformity in the Microlithography ProcessTay, A. 
2009Control of semiconductor substrate temperature uniformity during photoresist processing in lithographyTay, A. ; Chua, H.-T.; Wang, Y.; Yang, G.
Dec-2008Critical dimension and real-time temperature control for warped wafersHo, W.K. ; Tay, A. ; Fu, J. ; Chen, M.; Feng, Y.
Nov-2007Critical dimension uniformity via real-time photoresist thickness controlHo, W.K. ; Tay, A. ; Chen, M.; Fu, J. ; Lu, H.; Shan, X.
Aug-2003Design and implementation of a distributed evolutionary computing softwareTan, K.C. ; Tay, A. ; Cai, J.
2008Design-process integration for performance-based OPC frameworkTeh, S.-H.; Heng, C.-H. ; Tay, A. 
2004Detection of Wafer warpages during thermal processing in microlithographyHo, W.K. ; Tay, A. ; Zhou, Y.; Yang, K.; Hu, N.
2009Development of a framework and system for remote electronics experimentsTang, K.Z. ; Tan, K.K. ; Goh, Y.H.; Tay, A. ; Huang, S.N. ; Lee, T.H. 
2012Development of in-situ real-time CD monitoring and control system through PEB processYang, G.; Tay, A. ; Ho, W.K. 
2008Device performance-based OPC for optimal circuit performance and mask cost reductionTeh, S.-H.; Heng, C.-H. ; Tay, A. 
2008Direct measurement of beam size in a spectroscopic ellipsometry setupTay, A. ; Ng, T.W.; Wang, Y.; Zhao, S. 
2007Discovering Chinese chess strategies through coevolutionary approachesOng, C.S.; Quek, H.Y.; Tan, K.C. ; Tay, A. 
Jan-2007Disturbance compensation incorporated in predictive control system using a repetitive learning approachTan, K.K. ; Huang, S.N. ; Lee, T.H. ; Tay, A.