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TAY EE BENG,ARTHUR
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Showing results 14 to 33 of 120
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Issue Date
Title
Author(s)
Feb-2010
Bridging physics to electronics - An outreach effort
Tan, K.-K.
;
Tang, K.-Z.
;
Ng, V.
;
Tay, A.
;
Yen, S.-C.
;
Lee, T.-H.
2008
CD uniformity control via real-time control of photoresist properties
Chen, M.
;
Fu, J.
;
Ho, W.K.
;
Tay, A.
Feb-2005
Characterizing photolithographic linewidth sensitivity to process temperature variations for advanced resists using a thermal array
Schaper, C.D.
;
El-Awady, K.
;
Kailath, T.
;
Tay, A.
;
Lee, L.L.
;
Ho, W.K.
;
Fuller, S.E.
2005
Combined data reconciliation and parameter estimation
Thian, B.S.
;
Joe, Y.Y.
;
Tay, A.
;
Doan, X.-T.
Jul-2010
Computationally efficient behaviour based controller for real time car racing simulation
Tan, C.H.
;
Tan, K.C.
;
Tay, A.
Feb-2004
Constraint feedforward control for thermal processing of quartz photomasks in microelectronics manufacturing
Tay, A.
;
Ho, W.K.
;
Schaper, C.D.
;
Lee, L.L.
2002
Control and signal processing for photoresist processing in microlithography
Tay, A.
;
Ho, W.K.
;
Lim, K.W.
;
Loh, A.P.
;
Tan, W.W.
15-Jan-2006
Control of photoresist film thickness: Iterative feedback tuning approach
Tay, A.
;
Khuen Ho, W.
;
Deng, J.
;
Keng Lok, B.
2003
Control of Photoresist Thickness Uniformity in the Microlithography Process
Tay, A.
2009
Control of semiconductor substrate temperature uniformity during photoresist processing in lithography
Tay, A.
;
Chua, H.-T.
;
Wang, Y.
;
Yang, G.
Dec-2008
Critical dimension and real-time temperature control for warped wafers
Ho, W.K.
;
Tay, A.
;
Fu, J.
;
Chen, M.
;
Feng, Y.
Nov-2007
Critical dimension uniformity via real-time photoresist thickness control
Ho, W.K.
;
Tay, A.
;
Chen, M.
;
Fu, J.
;
Lu, H.
;
Shan, X.
Aug-2003
Design and implementation of a distributed evolutionary computing software
Tan, K.C.
;
Tay, A.
;
Cai, J.
2008
Design-process integration for performance-based OPC framework
Teh, S.-H.
;
Heng, C.-H.
;
Tay, A.
2004
Detection of Wafer warpages during thermal processing in microlithography
Ho, W.K.
;
Tay, A.
;
Zhou, Y.
;
Yang, K.
;
Hu, N.
2009
Development of a framework and system for remote electronics experiments
Tang, K.Z.
;
Tan, K.K.
;
Goh, Y.H.
;
Tay, A.
;
Huang, S.N.
;
Lee, T.H.
2012
Development of in-situ real-time CD monitoring and control system through PEB process
Yang, G.
;
Tay, A.
;
Ho, W.K.
2008
Device performance-based OPC for optimal circuit performance and mask cost reduction
Teh, S.-H.
;
Heng, C.-H.
;
Tay, A.
2008
Direct measurement of beam size in a spectroscopic ellipsometry setup
Tay, A.
;
Ng, T.W.
;
Wang, Y.
;
Zhao, S.
2007
Discovering Chinese chess strategies through coevolutionary approaches
Ong, C.S.
;
Quek, H.Y.
;
Tan, K.C.
;
Tay, A.