Browsing by Author BOURDILLON,ANTONY J

Select a letter below to browse by last name or type
0-9 A B C D E F G H I J K L M N O P Q R S T U V W X Y Z


Showing results 14 to 26 of 26 < previous 
Issue DateTitleAuthor(s)
1999Novel fiducial grid for X-ray masksSoo, C.P.; Chandra, S.; Kong, J.R. ; Bourdillon, A.J. ; Lu, B.
Mar-1996Orientation anomalies in plating thickness measurements from advanced packaging substratesTan, N.X.; Lee, A.J.Y.; Bourdillon, A.J. ; Tan, C.Y.S.
1999Study of acid diffusion in a positive tone chemically amplified resist using an on-wafer imaging techniqueLu, B.; Taylor, J.W.; Cerrina, F.; Soo, C.P.; Bourdillon, A.J. 
1999Study on the effect of incorporating nitrogen ions on titanium disilicide thin film formation for ULSI applicationsLim, C.W.; Bourdillon, A.J. ; Gong, H. ; Lahiri, S.K.; Pey, K.L.; Lee, K.H.
19-Jul-1999Surface smoothing of floating gates in flash memory devices via surface nitrogen and carbon incorporationCha, C.-L.; Chor, E.-F. ; Gong, H. ; Bourdillon, A.J. ; Jia, Y.-M.; Pan, J.-S. ; Zhang, A.-Q.; Chan, L.
1996Thermal stability in high-Tc coil and magnet design by process control of Bi(Pb)-2223/Ag multifilamentary tapesVo, N.V.; Neo, C.C.; Bourdillon, A.J. ; Dou, S.X.; Liu, H.K.
1-Mar-1999Transmission electron microscopy observation of CMOS devices of titanium self-aligned silicide technology with nitrogen (N+) implantation processJia, Y.M.; Lim, C.W.; Bourdillon, A.J. ; Boothroyd, C.
1997Transmission electron microscopy of defects in NMOS and PMOS structuresBourdillon, A.J. ; Koh, Y.G.; Chiang, S.L.; Lim, C.W.; Kong, J.R.; Cao, G.
3-Jul-2002ULTRA HIGH RESOLUTION LITHOGRAPHIC IMAGING AND PRINTING AND DEFECT REDUCTION BY EXPOSURE NEAR THE CRITICAL CONDITIONVLADIMIRSKY, YULI ; BOURDILLON, ANTONY 
8-Mar-2001ULTRA HIGH RESOLUTION LITHOGRAPHIC IMAGING AND PRINTING AND DEFECT REDUCTION BY EXPOSURE NEAR THE CRITICAL CONDITIONVLADIMIRSKY, YULI ; BOURDILLON, ANTONY 
8-Mar-2001ULTRA HIGH RESOLUTION LITHOGRAPHIC IMAGING AND PRINTING AND DEFECT REDUCTION BY EXPOSURE NEAR THE CRITICAL CONDITIONVLADIMIRSKY, YULI ; BOURDILLON, ANTONY 
7-May-2002Ultra high resolution lithographic imaging and printing and defect reduction by exposure near the critical condition utilizing fresnel diffractionVLADIMIRSKY, YULI ; BOURDILLON, ANTONY 
Jun-2000Use of the track structure approach in TEMBourdillon, A.J.