Browsing by Author LIU RONG

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Showing results 41 to 60 of 60 < previous 
Issue DateTitleAuthor(s)
Jul-2006Self-organized nanodot formation on InP(1 0 0) by oxygen ion sputteringTan, S.K.; Liu, R. ; Sow, C.H. ; Wee, A.T.S. 
1-Jun-2006Sharp n-type doping profiles in Si/SiGe heterostructures produced by atomic hydrogen etchingZhang, J.; Turner, S.G.; Chiam, S.Y.; Liu, R. ; Tok, E.S. ; Wee, A.T.S. ; Huan, A.C.H.; Kelly, I.; Mulcahy, C.P.A.
15-Jan-2003SIMS backside depth profiling of ultra shallow implantsYeo, K.L.; Wee, A.T.S. ; See, A.; Liu, R. ; Ng, C.M.
May-2002SIMS backside depth profiling of ultrashallow implants using silicon-on-insulator substratesYeo, K.L.; Wee, A.T.S. ; Liu, R. ; Ng, C.M.; See, A.
20-Jan-2002Sims depth profiling analysis of Cu/Ta/SiO2 interfacial diffusion at different annealing temperatureLiu, L. ; Gong, H. ; Wang, Y. ; Wee, A.T.S. ; Liu, R. 
2001SIMS study of silicon oxynitride rapid thermally grown in nitric oxideLiu, R. ; Koa, K.H.; Wee, A.T.S. ; Lai, W.H.; Li, M.F. ; See, A.; Chan, L.
1-Jan-2000Structural characterization of rapid thermal oxidized Si1-x-yGexCy alloy films grown by rapid thermal chemical vapor depositionChoi, W.K. ; Chen, J.H. ; Bera, L.K. ; Feng, W.; Pey, K.L. ; Mi, J.; Yang, C.Y.; Ramam, A. ; Chua, S.J. ; Pan, J.S. ; Wee, A.T.S. ; Liu, R. 
Sep-2004Study of copper diffusion into Ta and TaN barrier materials for MOS devicesLoh, S.W.; Zhang, D.H.; Li, C.Y.; Liu, R. ; Wee, A.T.S. 
20-Jan-2002Study of copper diffusion into tantalum and tantalum diffusion into copperLoh, S.W.; Zhang, D.H.; Li, C.Y.; Liu, R. ; Wee, A.T.S. 
2002Study of copper diffusion into tantalum nitride (Ta2N) by rapid thermal annealing (RTA)Loh, S.W.; Zhang, D.H.; Liu, R. ; Li, C.Y.; Wee, A.T.S. 
Oct-2001Study of copper suicide retardation effects on copper diffusion in siliconLee, C.S.; Gong, H. ; Liu, R. ; Wee, A.T.S. ; Cha, C.L.; See, A.; Chan, L.
2001Study of Cu diffusion in Cu/Tan/SiO2/Si multilayer structuresZhang, D.H.; Loh, S.W.; Li, C.Y.; Foo, P.D.; Xie, J.; Liu, R. ; Wee, A.T.S. ; Zhang, L.; Lee, Y.K.
15-Jun-2004Sub-keV secondary ion mass spectrometry depth profiling: Comparison of sample rotation and oxygen floodingLiu, R. ; Wee, A.T.S. 
Jan-2002Substrate temperature studies of SrBi2(Ta1-xNbx)2O9 grown by pulsed laser ablation depositionTay, S.T.; Huan, C.H.A. ; Wee, A.T.S. ; Liu, R. ; Goh, W.C. ; Ong, C.K. ; Chen, G.S.
Oct-2002Suppression of UV photoluminescence in sandwich-structured Si/C composite filmsZhu, Y. ; Yuan, C.L. ; Liu, R. ; Ong, P.P. 
15-Jan-2003Surface roughening effect in sub-keV SIMS depth profilingLiu, R. ; Ng, C.M.; Wee, A.T.S. 
22-Sep-2005Surfactant and impurity properties of antimony on GaAs and GaAs 1-xNx on GaAs [100] by solid source molecular beam epitaxyCheah, W.K.; Fan, W.J.; Yoon, S.F.; Tan, K.H.; Liu, R. ; Wee, A.T.S. 
2001The investigation of surface topography development in Si(001) and Si(111) during SIMS depth profilingLau, G.S.; Tok, E.S. ; Wee, A.T.S. ; Liu, R. ; Lim, S.L. 
2000The use of sample rotation in SIMS profiling of Ta barrier layers to Cu diffusionLiu, R. ; Wee, A.T.S. ; Liu, L. ; Hao, G. 
Aug-2004Thermal stability of Cu/Ta/ultra low k porous polymer structures for multilevel interconnectsZhang, D.H.; Yang, L.Y.; Li, C.Y.; Liu, R. ; Wee, A.T.S. ; Foo, P.D.