Browsing by Author NAVAL MARVIC JOHN SANTOS

Showing results 1 to 1 of 1
Issue DateTitleAuthor(s)
1-Jan-2018High-quality doped polycrystalline silicon using low-pressure chemical vapor deposition (LPCVD)Padhamnath, P ; Nandakumar, N ; Kitz, BJ ; Balaji, N ; Naval, MJ ; Shanmugam, V ; Duttagupta, S