Browsing by Author HUANG ANYA

Showing results 1 to 2 of 2
Issue DateTitleAuthor(s)
1999Control of an integrated bake/chill systemLoh, A.P. ; Huang, A. ; Tan, W.W. ; Lim, K.W. ; Ho, W.K. 
2001Spatially-programmable thermal processing module for 300 mm wafer processingTay, A. ; Khiang Wee Lim; Ai Poh Loh; Woei Wan Tan; Weng Khuen Ho; Huang, A. ; Fu, J.