Browsing by Author LAU KIA HIAN

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Issue DateTitleAuthor(s)
Nov-2013Releasing high aspect ratio SU-8 microstructures using AZ photoresist as a sacrificial layer on metallized Si substratesLau, K.H. ; Giridhar, A.; Harikrishnan, S.; Satyanarayana, N. ; Sinha, S.K.