Please use this identifier to cite or link to this item:
https://doi.org/10.1088/0960-1317/22/11/113001
DC Field | Value | |
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dc.title | Three-dimensional silicon micromachining | |
dc.contributor.author | Azimi, S. | |
dc.contributor.author | Song, J. | |
dc.contributor.author | Dang, Z.Y. | |
dc.contributor.author | Liang, H.D. | |
dc.contributor.author | Breese, M.B.H. | |
dc.date.accessioned | 2014-10-16T09:54:21Z | |
dc.date.available | 2014-10-16T09:54:21Z | |
dc.date.issued | 2012-11 | |
dc.identifier.citation | Azimi, S., Song, J., Dang, Z.Y., Liang, H.D., Breese, M.B.H. (2012-11). Three-dimensional silicon micromachining. Journal of Micromechanics and Microengineering 22 (11) : -. ScholarBank@NUS Repository. https://doi.org/10.1088/0960-1317/22/11/113001 | |
dc.identifier.issn | 09601317 | |
dc.identifier.uri | http://scholarbank.nus.edu.sg/handle/10635/99032 | |
dc.description.abstract | A process for fabricating arbitrary-shaped, two- and three-dimensional silicon and porous silicon components has been developed, based on high-energy ion irradiation, such as 250keV to 1 MeV protons and helium. Irradiation alters the hole current flow during subsequent electrochemical anodization, allowing the anodization rate to be slowed or stopped for low/high fluences. For moderate fluences the anodization rate is selectively stopped only at depths corresponding to the high defect density at the end of ion range, allowing true three-dimensional silicon machining. The use of this process in fields including optics, photonics, holography and nanoscale depth machining is reviewed. © 2012 IOP Publishing Ltd. | |
dc.source | Scopus | |
dc.type | Review | |
dc.contributor.department | PHYSICS | |
dc.description.doi | 10.1088/0960-1317/22/11/113001 | |
dc.description.sourcetitle | Journal of Micromechanics and Microengineering | |
dc.description.volume | 22 | |
dc.description.issue | 11 | |
dc.description.page | - | |
dc.description.coden | JMMIE | |
dc.identifier.isiut | 000310534400001 | |
Appears in Collections: | Staff Publications |
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