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|Title:||The second generation Singapore high resolution proton beam writing facility|
|Authors:||Van Kan, J.A. |
Baysic De Vera, A.
|Citation:||Van Kan, J.A., Malar, P., Baysic De Vera, A. (2012-02). The second generation Singapore high resolution proton beam writing facility. Review of Scientific Instruments 83 (2) : -. ScholarBank@NUS Repository. https://doi.org/10.1063/1.3662205|
|Abstract:||A new proton beam focusing facility, designed for proton beam writing (PBW) applications has been tested. PBW allows for proximity free structuring of high aspect ratio, high-density 3D nanostructures. The new facility is designed around OM52 compact quadrupole lenses capable of operating in a variety of high demagnification configurations. Performance tests show that proton beams can be focused down to 19.0 × 29.9 nm 2 and single line scans show a beam width of 12.6 nm. The ultimate goal of sub 10 nm structuring with MeV protons will be discussed. © 2012 American Institute of Physics.|
|Source Title:||Review of Scientific Instruments|
|Appears in Collections:||Staff Publications|
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