Please use this identifier to cite or link to this item: https://doi.org/10.1063/1.3662205
Title: The second generation Singapore high resolution proton beam writing facility
Authors: Van Kan, J.A. 
Malar, P. 
Baysic De Vera, A. 
Issue Date: Feb-2012
Citation: Van Kan, J.A., Malar, P., Baysic De Vera, A. (2012-02). The second generation Singapore high resolution proton beam writing facility. Review of Scientific Instruments 83 (2) : -. ScholarBank@NUS Repository. https://doi.org/10.1063/1.3662205
Abstract: A new proton beam focusing facility, designed for proton beam writing (PBW) applications has been tested. PBW allows for proximity free structuring of high aspect ratio, high-density 3D nanostructures. The new facility is designed around OM52 compact quadrupole lenses capable of operating in a variety of high demagnification configurations. Performance tests show that proton beams can be focused down to 19.0 × 29.9 nm 2 and single line scans show a beam width of 12.6 nm. The ultimate goal of sub 10 nm structuring with MeV protons will be discussed. © 2012 American Institute of Physics.
Source Title: Review of Scientific Instruments
URI: http://scholarbank.nus.edu.sg/handle/10635/98931
ISSN: 00346748
DOI: 10.1063/1.3662205
Appears in Collections:Staff Publications

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