Please use this identifier to cite or link to this item:
|Title:||The second generation Singapore high resolution proton beam writing facility|
|Authors:||Van Kan, J.A. |
Baysic De Vera, A.
|Citation:||Van Kan, J.A., Malar, P., Baysic De Vera, A. (2012-02). The second generation Singapore high resolution proton beam writing facility. Review of Scientific Instruments 83 (2) : -. ScholarBank@NUS Repository. https://doi.org/10.1063/1.3662205|
|Abstract:||A new proton beam focusing facility, designed for proton beam writing (PBW) applications has been tested. PBW allows for proximity free structuring of high aspect ratio, high-density 3D nanostructures. The new facility is designed around OM52 compact quadrupole lenses capable of operating in a variety of high demagnification configurations. Performance tests show that proton beams can be focused down to 19.0 × 29.9 nm 2 and single line scans show a beam width of 12.6 nm. The ultimate goal of sub 10 nm structuring with MeV protons will be discussed. © 2012 American Institute of Physics.|
|Source Title:||Review of Scientific Instruments|
|Appears in Collections:||Staff Publications|
Show full item record
Files in This Item:
There are no files associated with this item.
checked on Mar 16, 2019
WEB OF SCIENCETM
checked on Feb 27, 2019
checked on Mar 23, 2019
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.