Please use this identifier to cite or link to this item: https://doi.org/10.4028/www.scientific.net/KEM.447-448.452
Title: Sub Micron Poly-Dimethyl Siloxane (PDMS) replication using proton beam fabricated nickel moulds
Authors: Peige, S. 
Van Kan, J.A. 
Watt, F. 
Keywords: Microfluidics
Ni mould
PDMS
Proton beam writing
Issue Date: 2010
Citation: Peige, S., Van Kan, J.A., Watt, F. (2010). Sub Micron Poly-Dimethyl Siloxane (PDMS) replication using proton beam fabricated nickel moulds. Key Engineering Materials 447 448 : 452-455. ScholarBank@NUS Repository. https://doi.org/10.4028/www.scientific.net/KEM.447-448.452
Abstract: We present a process to fabricate Ni moulds on proton beam written (PBW) PMMA structures. These Ni mould are use to replicate PDMS lab on a chip devices featuring 300 nm details of high verticality, smooth sidewalls and high aspect ratios. The lifespan of the Ni mould can be extended and the functionality improved by means of introducing a 5 nm thick Teflon AF release layer. Following this method, PDMS chips have been fabricated for microfluidic experiments. © (2010) Trans Tech Publications.
Source Title: Key Engineering Materials
URI: http://scholarbank.nus.edu.sg/handle/10635/98905
ISBN: 9780878492565
ISSN: 10139826
DOI: 10.4028/www.scientific.net/KEM.447-448.452
Appears in Collections:Staff Publications

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