Please use this identifier to cite or link to this item:
|Title:||Simulation for deposition of ZnO thin film layer by kinetic Monte Carlo method|
Kinetic Monte Carlo
|Citation:||Dee, C.F., Lee, J.D., Sow, C.H., Majlis, B.Y., Hamzah, A., Abdullah, H., Lee, S.-K. (2009-09). Simulation for deposition of ZnO thin film layer by kinetic Monte Carlo method. Materials Research Innovations 13 (3) : 135-138. ScholarBank@NUS Repository. https://doi.org/10.1179/143307509X437437|
|Abstract:||Kinetic Monte Carlo method was used to simulate the deposition of ZnO thin film layers. For this simulation, parameters for atom absorption, desorption and surface diffusion were incorporated to perform more realistic model of deposition. A new approach was used where the diffusion process was integrated as part of the deposition process. Simulations were carried out at different substrate temperatures. Two- and three-dimensional growth mechanisms were simulated using this model. Surface roughness can be estimated from the ratio of the atoms at the edge of the islands to the total surface sites. The number of Zn and O adatoms on the surface as a time function was analysed. © W. S. Maney & Son Ltd. 2009.|
|Source Title:||Materials Research Innovations|
|Appears in Collections:||Staff Publications|
Show full item record
Files in This Item:
There are no files associated with this item.
checked on Sep 19, 2018
WEB OF SCIENCETM
checked on Sep 10, 2018
checked on Sep 21, 2018
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.