Please use this identifier to cite or link to this item: https://doi.org/10.1117/12.908228
Title: Radio frequency plasma pre-treatment for selective electroless Ag coating of three dimensional SU-8 microstructures
Authors: Bettiol, A.A. 
Yan, Y.
Teo, E.J.
Tanoto, H.
Teng, J.
Keywords: Direct laser writing
Electroless plating
Metamaterials
Issue Date: 2012
Citation: Bettiol, A.A., Yan, Y., Teo, E.J., Tanoto, H., Teng, J. (2012). Radio frequency plasma pre-treatment for selective electroless Ag coating of three dimensional SU-8 microstructures. Proceedings of SPIE - The International Society for Optical Engineering 8249 : -. ScholarBank@NUS Repository. https://doi.org/10.1117/12.908228
Abstract: Three dimensional metamaterials are fabricated using direct laser writing in SU-8 polymer followed by an electroless coating process. A method has been developed to allow for selective electroless plating of SU-8 microstructures with a smooth conformal coating of Ag. The process utilizes radio frequency plasma pretreatment to modify the SU-8 surface so that Ag ions can nucleate on the surface, leaving the substrate uncoated. An array of split ring resonators and other 3D microstructures are used to demonstrate how the technique can be applied to metamaterials applications. © 2012 SPIE..
Source Title: Proceedings of SPIE - The International Society for Optical Engineering
URI: http://scholarbank.nus.edu.sg/handle/10635/98862
ISBN: 9780819488923
ISSN: 0277786X
DOI: 10.1117/12.908228
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