Please use this identifier to cite or link to this item: https://doi.org/10.1016/j.nimb.2011.02.051
Title: Proton beam writing of long, arbitrary structures for micro/nano photonics and fluidics applications
Authors: Udalagama, C. 
Teo, E.J. 
Chan, S.F.
Kumar, V.S.
Bettiol, A.A. 
Watt, F. 
Keywords: Ion lithography
Microfluidics
Photonics
Proton beam writing
Issue Date: 15-Oct-2011
Source: Udalagama, C., Teo, E.J., Chan, S.F., Kumar, V.S., Bettiol, A.A., Watt, F. (2011-10-15). Proton beam writing of long, arbitrary structures for micro/nano photonics and fluidics applications. Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 269 (20) : 2417-2421. ScholarBank@NUS Repository. https://doi.org/10.1016/j.nimb.2011.02.051
Abstract: The last decade has seen proton beam writing maturing into a versatile lithographic technique able to produce sub-100 nm, high aspect ratio structures with smooth side walls. However, many applications in the fields of photonics and fluidics require the fabrication of structures with high spatial resolution that extends over several centimetres. This cannot be achieved by purely magnetic or electrostatic beam scanning due to the large off-axis beam aberrations in high demagnification systems. As a result, this has limited us to producing long straight structures using a combination of beam and stage scanning. In this work we have: (1) developed an algorithm to include any arbitrary pattern into the writing process by using a more versatile combination of beam and stage scanning while (2) incorporating the use of the ubiquitous AutoCAD DXF (drawing exchange format) into the design process. We demonstrate the capability of this approach in fabricating structures such as Y-splitters, Mach-Zehnder modulators and microfluidic channels that are over several centimetres in length, in polymer. We also present optimisation of such parameters as scanning speed and scanning loops to improve on the surface roughness of the structures. This work opens up new possibilities of using CAD software in PBW for microphotonics and fluidics device fabrication.
Source Title: Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
URI: http://scholarbank.nus.edu.sg/handle/10635/98854
ISSN: 0168583X
DOI: 10.1016/j.nimb.2011.02.051
Appears in Collections:Staff Publications

Show full item record
Files in This Item:
There are no files associated with this item.

SCOPUSTM   
Citations

7
checked on Apr 16, 2018

WEB OF SCIENCETM
Citations

7
checked on Apr 16, 2018

Page view(s)

34
checked on Mar 12, 2018

Google ScholarTM

Check

Altmetric


Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.