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|Title:||Proton beam micromachining dose normalization for SU-8 using ionoluminescence detection|
|Authors:||Udalagama, C.N.B. |
Van Kan, J.A.
Proton beam micromachining
|Citation:||Udalagama, C.N.B., Bettiol, A.A., Van Kan, J.A., Watt, F. (2003-09). Proton beam micromachining dose normalization for SU-8 using ionoluminescence detection. Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 210 : 256-259. ScholarBank@NUS Repository. https://doi.org/10.1016/S0168-583X(03)01023-1|
|Abstract:||Proton beam micromachining (PBM) allows the production of small, intricate, high aspect ratio structures with smooth sidewalls by direct writing MeV protons beams in resist materials such as SU-8 and PMMA. The process depends on the correct incident dose of protons, and conventional normalizing methods using RBS have been utilized previously. However for accelerated (sensitive) resists such as SU-8, the yield of backscattered ions, particularly for small structures, is insufficient for accurate dose measurement. We have used the more prolific ion induced photon emission from SU-8 as a dose normalizing signal for PBM. The SU-8 emits radiation at a wavelength of 560 nm under proton irradiation, and the yield per incident proton depends on the thickness of the resist layer. The photon yield per incident proton has a maximum value at a dose of 25 nCmm-2. The photon normalization method has been used to good effect to micromachine a complex shape with resulting good edge definition. © 2003 Elsevier B.V. All rights reserved.|
|Source Title:||Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms|
|Appears in Collections:||Staff Publications|
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