Please use this identifier to cite or link to this item:
|Title:||Proton beam micromachining dose normalization for SU-8 using ionoluminescence detection|
|Authors:||Udalagama, C.N.B. |
Van Kan, J.A.
Proton beam micromachining
|Source:||Udalagama, C.N.B., Bettiol, A.A., Van Kan, J.A., Watt, F. (2003-09). Proton beam micromachining dose normalization for SU-8 using ionoluminescence detection. Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 210 : 256-259. ScholarBank@NUS Repository. https://doi.org/10.1016/S0168-583X(03)01023-1|
|Abstract:||Proton beam micromachining (PBM) allows the production of small, intricate, high aspect ratio structures with smooth sidewalls by direct writing MeV protons beams in resist materials such as SU-8 and PMMA. The process depends on the correct incident dose of protons, and conventional normalizing methods using RBS have been utilized previously. However for accelerated (sensitive) resists such as SU-8, the yield of backscattered ions, particularly for small structures, is insufficient for accurate dose measurement. We have used the more prolific ion induced photon emission from SU-8 as a dose normalizing signal for PBM. The SU-8 emits radiation at a wavelength of 560 nm under proton irradiation, and the yield per incident proton depends on the thickness of the resist layer. The photon yield per incident proton has a maximum value at a dose of 25 nCmm-2. The photon normalization method has been used to good effect to micromachine a complex shape with resulting good edge definition. © 2003 Elsevier B.V. All rights reserved.|
|Source Title:||Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms|
|Appears in Collections:||Staff Publications|
Show full item record
Files in This Item:
There are no files associated with this item.
checked on Feb 19, 2018
WEB OF SCIENCETM
checked on Feb 7, 2018
checked on Feb 20, 2018
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.