Please use this identifier to cite or link to this item: https://doi.org/10.4028/www.scientific.net/KEM.447-448.188
Title: Nickel injection mould fabrication via proton beam writing and UV lithography
Authors: Nan, L.N.
Peige, S. 
Kulkarni, S.R. 
Jianhong, Z.
Van Kan, J.A. 
Keywords: Fluidics
Injection moulding
Ni mould
Proton beam writing
UV lithography
Issue Date: 2010
Citation: Nan, L.N., Peige, S., Kulkarni, S.R., Jianhong, Z., Van Kan, J.A. (2010). Nickel injection mould fabrication via proton beam writing and UV lithography. Key Engineering Materials 447 448 : 188-192. ScholarBank@NUS Repository. https://doi.org/10.4028/www.scientific.net/KEM.447-448.188
Abstract: For applications of injection mould fabrication in the field of MEMS, proton beam writing (PBW) and UV lithography are combined to manufacture 2 mm thick Ni moulds with sub-10 μm fine features in 10 μm deep fluidic channels. PBW is capable of writing micro and nano features with straight and smooth sidewalls with sub-10 nm RMS roughness, while UV lithography has the advantage of large area structuring through a mask. A newly developed positive resist maP1275 hv is presented in combination with PBW and UV lithography for Ni injection mould fabrication. Fine micro pillars with straight and smooth sidewalls have been achieved by PBW and linked with UV lithography into a microfluidic channel. The new resist is successfully removed after electroplating without compromising the Ni mould. © (2010) Trans Tech Publications.
Source Title: Key Engineering Materials
URI: http://scholarbank.nus.edu.sg/handle/10635/98810
ISBN: 9780878492565
ISSN: 10139826
DOI: 10.4028/www.scientific.net/KEM.447-448.188
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