Please use this identifier to cite or link to this item:
https://scholarbank.nus.edu.sg/handle/10635/98753
DC Field | Value | |
---|---|---|
dc.title | Improvement in proton beam writing at the nano scale | |
dc.contributor.author | Van Kan, J.A. | |
dc.contributor.author | Bettiol, A.A. | |
dc.contributor.author | Ansari, K. | |
dc.contributor.author | Shao, P. | |
dc.contributor.author | Watt, F. | |
dc.date.accessioned | 2014-10-16T09:51:01Z | |
dc.date.available | 2014-10-16T09:51:01Z | |
dc.date.issued | 2004 | |
dc.identifier.citation | Van Kan, J.A.,Bettiol, A.A.,Ansari, K.,Shao, P.,Watt, F. (2004). Improvement in proton beam writing at the nano scale. Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) : 673-676. ScholarBank@NUS Repository. | |
dc.identifier.issn | 10846999 | |
dc.identifier.uri | http://scholarbank.nus.edu.sg/handle/10635/98753 | |
dc.description.abstract | Here we report on the progress of 3D nano machining using MeV protons. In proton beam (p-beam) writing a proton beam is typically focused down to a sub 100 nm spot size and scanned over a resist material (e.g. Su-8 or PMMA). Currently the scanning is performed using a magnetic scan coil which has an intrinsically long settling time. A new scanning system is introduced which employs electrostatic scanning and allows an increase in writing speed up to 2 orders of magnitude. | |
dc.source | Scopus | |
dc.type | Conference Paper | |
dc.contributor.department | PHYSICS | |
dc.description.sourcetitle | Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) | |
dc.description.page | 673-676 | |
dc.description.coden | PMEME | |
dc.identifier.isiut | NOT_IN_WOS | |
Appears in Collections: | Staff Publications |
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