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|Title:||Improvement in proton beam writing at the nano scale|
|Authors:||Van Kan, J.A. |
|Source:||Van Kan, J.A.,Bettiol, A.A.,Ansari, K.,Shao, P.,Watt, F. (2004). Improvement in proton beam writing at the nano scale. Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) : 673-676. ScholarBank@NUS Repository.|
|Abstract:||Here we report on the progress of 3D nano machining using MeV protons. In proton beam (p-beam) writing a proton beam is typically focused down to a sub 100 nm spot size and scanned over a resist material (e.g. Su-8 or PMMA). Currently the scanning is performed using a magnetic scan coil which has an intrinsically long settling time. A new scanning system is introduced which employs electrostatic scanning and allows an increase in writing speed up to 2 orders of magnitude.|
|Source Title:||Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)|
|Appears in Collections:||Staff Publications|
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