Please use this identifier to cite or link to this item: http://scholarbank.nus.edu.sg/handle/10635/98753
Title: Improvement in proton beam writing at the nano scale
Authors: Van Kan, J.A. 
Bettiol, A.A. 
Ansari, K. 
Shao, P. 
Watt, F. 
Issue Date: 2004
Citation: Van Kan, J.A.,Bettiol, A.A.,Ansari, K.,Shao, P.,Watt, F. (2004). Improvement in proton beam writing at the nano scale. Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) : 673-676. ScholarBank@NUS Repository.
Abstract: Here we report on the progress of 3D nano machining using MeV protons. In proton beam (p-beam) writing a proton beam is typically focused down to a sub 100 nm spot size and scanned over a resist material (e.g. Su-8 or PMMA). Currently the scanning is performed using a magnetic scan coil which has an intrinsically long settling time. A new scanning system is introduced which employs electrostatic scanning and allows an increase in writing speed up to 2 orders of magnitude.
Source Title: Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
URI: http://scholarbank.nus.edu.sg/handle/10635/98753
ISSN: 10846999
Appears in Collections:Staff Publications

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