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|Title:||Fabrication of optical microresonators using proton beam writing|
Proton beam writing
|Citation:||Kumar, V.S., Turaga, S.P., Teo, E.J., Bettiol, A.A. (2013-02). Fabrication of optical microresonators using proton beam writing. Microelectronic Engineering 102 : 33-35. ScholarBank@NUS Repository. https://doi.org/10.1016/j.mee.2012.02.017|
|Abstract:||Proton beam writing is a high-resolution direct write lithographic technique capable of producing three dimensional, high aspect ratio structures with smooth and vertical sidewalls. In this work, the fabrication of high quality SU-8 optical microdisk resonator with a Q factor of 10 4 is demonstrated. Simulations carried out using finite difference time domain (FDTD) are in good agreement with experimental results. By introducing rhodamine B laser dye into a SU-8 resist spiral microdisk cavity lasing was achieved with threshold pump fluence of 127 μJ/mm 2 when pumped with a 532 nm pulsed Nd:YAG laser. © 2011 Elsevier B.V. All rights reserved.|
|Source Title:||Microelectronic Engineering|
|Appears in Collections:||Staff Publications|
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