Please use this identifier to cite or link to this item: https://doi.org/10.1016/j.mee.2012.02.017
Title: Fabrication of optical microresonators using proton beam writing
Authors: Kumar, V.S.
Turaga, S.P.
Teo, E.J.
Bettiol, A.A. 
Keywords: FDTD simulations
Laser cavity
Optical microresonator
Proton beam writing
Issue Date: Feb-2013
Citation: Kumar, V.S., Turaga, S.P., Teo, E.J., Bettiol, A.A. (2013-02). Fabrication of optical microresonators using proton beam writing. Microelectronic Engineering 102 : 33-35. ScholarBank@NUS Repository. https://doi.org/10.1016/j.mee.2012.02.017
Abstract: Proton beam writing is a high-resolution direct write lithographic technique capable of producing three dimensional, high aspect ratio structures with smooth and vertical sidewalls. In this work, the fabrication of high quality SU-8 optical microdisk resonator with a Q factor of 10 4 is demonstrated. Simulations carried out using finite difference time domain (FDTD) are in good agreement with experimental results. By introducing rhodamine B laser dye into a SU-8 resist spiral microdisk cavity lasing was achieved with threshold pump fluence of 127 μJ/mm 2 when pumped with a 532 nm pulsed Nd:YAG laser. © 2011 Elsevier B.V. All rights reserved.
Source Title: Microelectronic Engineering
URI: http://scholarbank.nus.edu.sg/handle/10635/98708
ISSN: 01679317
DOI: 10.1016/j.mee.2012.02.017
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