Please use this identifier to cite or link to this item: https://doi.org/10.1016/j.mee.2012.05.020
Title: Fabrication of nickel molds using proton beam writing for micro/nano fluidic devices
Authors: Liu, F.
Tan, K.B.
Malar, P. 
Bikkarolla, S.K.
Van Kan, J.A. 
Keywords: DNA analysis
Nickel molds
Proton beam writing
Issue Date: Feb-2013
Citation: Liu, F., Tan, K.B., Malar, P., Bikkarolla, S.K., Van Kan, J.A. (2013-02). Fabrication of nickel molds using proton beam writing for micro/nano fluidic devices. Microelectronic Engineering 102 : 36-39. ScholarBank@NUS Repository. https://doi.org/10.1016/j.mee.2012.05.020
Abstract: In this paper, we present the fabrication of micro/nano fluidic devices with the combination of proton beam writing and UV lithography. Proton beam writing was used to generate the fine features with smooth sidewall profiles on ma-N resist, 110 and 600 nm thick. UV lithography is used to fabricate the micron sized feeding channels properly aligned with the nanostructures on ma-P resist. To get a durable mold, we need to transfer the resist structure into a nickel mold. Nickel electroplating and re-electroplating have been carried out to replicate the polymer structure in a nickel mold with the desired geometry, resulting in a durable Ni master mold. Finally it is demonstrated that these Ni molds can be used to make high quality PDMS fluidic channels used for DNA lab on chip experiments. © 2011 Elsevier B.V. All rights reserved.
Source Title: Microelectronic Engineering
URI: http://scholarbank.nus.edu.sg/handle/10635/98707
ISSN: 01679317
DOI: 10.1016/j.mee.2012.05.020
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