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|Title:||Characterisation of 60° misfit dislocations in SiGe alloy using nuclear microscopy|
Transmission ion channeling
|Citation:||Huang, L., Breese, M.B.H., Teo, E.J. (2005-04). Characterisation of 60° misfit dislocations in SiGe alloy using nuclear microscopy. Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 231 (1-4) : 452-456. ScholarBank@NUS Repository. https://doi.org/10.1016/j.nimb.2005.01.099|
|Abstract:||This paper uses the transmission ion channeling technique on the NUS Singletron accelerator to map misfit dislocations at the interface of a SiGe layer epitaxially grown on a (0 0 1) silicon substrate. A bunch of five 60° dislocations and a single dislocation have been studied using a focused 2 MeV proton beam with a spatial resolution of 60 nm and good image statistics. The bent (1 1 0) planes due to 60° dislocations cause the image contrast to change asymmetrically while tilting the sample close to the channeling direction. © 2005 Elsevier B.V. All rights reserved.|
|Source Title:||Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms|
|Appears in Collections:||Staff Publications|
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