Please use this identifier to cite or link to this item: https://doi.org/10.1016/j.nimb.2005.01.088
Title: An automatic beam focusing system for MeV protons
Authors: Udalagama, C.N.B. 
Bettiol, A.A. 
Van Kan, J.A. 
Teo, E.J. 
Breese, M.B.H. 
Osipowicz, T. 
Watt, F. 
Keywords: Automatic MeV proton beam focusing
Proton beam writing
Secondary electron imaging
Issue Date: Apr-2005
Citation: Udalagama, C.N.B., Bettiol, A.A., Van Kan, J.A., Teo, E.J., Breese, M.B.H., Osipowicz, T., Watt, F. (2005-04). An automatic beam focusing system for MeV protons. Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 231 (1-4) : 389-393. ScholarBank@NUS Repository. https://doi.org/10.1016/j.nimb.2005.01.088
Abstract: An automatic focusing system for MeV protons has been developed. The focusing system utilises rapid real time proton induced secondary electron imaging of a calibration grid coupled with a modified Gaussian fit in order to take into account the enhanced secondary electron signal from the calibration grid edge. The focusing system has been successfully applied to MeV protons focused using a coupled triplet configuration of magnetic quadrupole lenses (Oxford triplet). Automatic beam focusing of a coarse beamspot of approximately (5 × 3.5) micrometres in the X and Y directions to a sub-micrometre beamspot of approximately (0.7 × 0.6) micrometers was achieved at a beam current of about 50 pA. © 2005 Elsevier B.V. All rights reserved.
Source Title: Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
URI: http://scholarbank.nus.edu.sg/handle/10635/98635
ISSN: 0168583X
DOI: 10.1016/j.nimb.2005.01.088
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