Please use this identifier to cite or link to this item: https://doi.org/10.1016/S0168-583X(01)00633-4
Title: Ultra shallow secondary ion mass spectrometry depth profiling: Limitation of sample rotation in improving depth resolution
Authors: Ng, C.M.
Wee, A.T.S. 
Huan, C.H.A. 
See, A.
Issue Date: Sep-2001
Source: Ng, C.M., Wee, A.T.S., Huan, C.H.A., See, A. (2001-09). Ultra shallow secondary ion mass spectrometry depth profiling: Limitation of sample rotation in improving depth resolution. Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 179 (4) : 557-560. ScholarBank@NUS Repository. https://doi.org/10.1016/S0168-583X(01)00633-4
Abstract: Depth resolution deterioration attributed to crater bottom roughness induced by 500 eV O2 + ion bombardment at 56° incidence angle is investigated. During this secondary ion mass spectrometry (SIMS) depth profiling process, sample rotation and oxygen flooding were applied to assess their effectiveness in suppressing surface roughness. Oxygen flooding was found to effectively suppress roughening and gives the best depth resolution at the energy and incident angle used. Although sample rotation was found to suppress roughening, the depth resolution was still degraded, which is counter-intuitive. Profiles fitted to the Hofmann model suggest that ion beam mixing may limit the depth resolution in low energy ion profiling. © 2001 Elsevier Science B.V. All rights reserved.
Source Title: Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
URI: http://scholarbank.nus.edu.sg/handle/10635/98495
ISSN: 0168583X
DOI: 10.1016/S0168-583X(01)00633-4
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