Please use this identifier to cite or link to this item: https://doi.org/10.1016/j.nimb.2012.11.050
Title: Three-dimensional metamaterials fabricated using Proton Beam Writing
Authors: Bettiol, A.A. 
Turaga, S.P.
Yan, Y.
Vanga, S.K.
Chiam, S.Y. 
Keywords: High aspect ratio
Metamaterials
Negative index materials
Proton Beam Writing
Sensing
Issue Date: 2013
Citation: Bettiol, A.A., Turaga, S.P., Yan, Y., Vanga, S.K., Chiam, S.Y. (2013). Three-dimensional metamaterials fabricated using Proton Beam Writing. Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 306 : 271-274. ScholarBank@NUS Repository. https://doi.org/10.1016/j.nimb.2012.11.050
Abstract: Proton Beam Writing (PBW) is a direct write lithographic technique that has recently been applied to the fabrication of three dimensional metamaterials. In this work, we show that the unique capabilities of PBW, namely the ability to fabricate arrays of high resolution, high aspect ratio microstructures in polymer or replicated into metal, is well suited to metamaterials research. We have also developed a novel method for selectively electroless plating silver directly onto polymer structures that were fabricated using PBW. This method opens up new avenues for utilizing PBW for making metamaterials and other sub-wavelength metallic structures. Several potential applications of three dimensional metamaterials fabricated using PBW are discussed, including sensing and negative refractive index materials. © 2013 Elsevier B.V. All rights reserved.
Source Title: Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
URI: http://scholarbank.nus.edu.sg/handle/10635/98397
ISSN: 0168583X
DOI: 10.1016/j.nimb.2012.11.050
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