Please use this identifier to cite or link to this item: http://scholarbank.nus.edu.sg/handle/10635/98266
Title: The effects of nitrogen flow on the Raman spectra of polycrystalline diamond films
Authors: Zhang, Q.
Yoon, S.F.
Ahn, J.
Rusli
Guo, Y.-P. 
Keywords: Polycrystalline diamond films
Raman scattering
X-ray diffraction
Issue Date: Nov-1998
Source: Zhang, Q.,Yoon, S.F.,Ahn, J.,Rusli,Guo, Y.-P. (1998-11). The effects of nitrogen flow on the Raman spectra of polycrystalline diamond films. Microelectronics Journal 29 (11) : 875-879. ScholarBank@NUS Repository.
Abstract: The effects of nitrogen on the formation and structure of polycrystalline diamond films prepared using a microwave plasma chemical vapour deposition system have been studied using Raman scattering, X-ray diffraction and X-ray photoelectron spectroscopy. It is found that the Raman spectra are significantly affected by nitrogen flow ratio, while the X-ray diffraction spectra only show certain changes in their peak intensity. Five Raman scattering peaks at 1140, 1190, 1350, 1480 and 1550 cm-1, respectively, are clearly observed. With increasing nitrogen flow ratio, the 1480 cm-1 peak decreases significantly and the 1140 and 1190 cm-1 peaks remain almost unchanged in comparison with the 1350 and 1550 cm-1 peaks. These results indicate that nitrogen plays an important role in modifying the structure of polycrystalline diamond films. © 1998 Published by Elsevier Science Ltd. All rights reserved.
Source Title: Microelectronics Journal
URI: http://scholarbank.nus.edu.sg/handle/10635/98266
ISSN: 00262692
Appears in Collections:Staff Publications

Show full item record
Files in This Item:
There are no files associated with this item.

Page view(s)

26
checked on Feb 17, 2018

Google ScholarTM

Check


Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.