Please use this identifier to cite or link to this item: https://doi.org/10.1016/j.nimb.2011.08.014
Title: Sub-100 keV ion beam generation with a Van de Graaff accelerator using an external DC voltage supply
Authors: Chan, T.K. 
Song, J.
Choo, T.F.
Breese, M.B.H. 
Keywords: Ion beam irradiation
Medium energy ion beam
Van de Graaff
Issue Date: 1-Dec-2011
Citation: Chan, T.K., Song, J., Choo, T.F., Breese, M.B.H. (2011-12-01). Sub-100 keV ion beam generation with a Van de Graaff accelerator using an external DC voltage supply. Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 269 (23) : 2699-2702. ScholarBank@NUS Repository. https://doi.org/10.1016/j.nimb.2011.08.014
Abstract: We present a method to produce stable proton and helium ion beams with energies of 10-100 keV from a 30-year-old Van De Graaff accelerator using an external stabilized DC voltage supply instead of the belt charging system. Requiring no other modifications, this makes an ideal system for ion irradiation with fluences up to 1015 ions/cm2. Such ion energies and fluences are required in the emerging fields such as silicon micromachining using ion irradiation and we give examples of structures created with sizes as small as 200 nm. © 2011 Elsevier B.V. All rights reserved.
Source Title: Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
URI: http://scholarbank.nus.edu.sg/handle/10635/98101
ISSN: 0168583X
DOI: 10.1016/j.nimb.2011.08.014
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