Please use this identifier to cite or link to this item: https://doi.org/10.1016/S0168-583X(99)00392-4
Title: Resist materials for proton micromachining
Authors: Van Kan, J.A. 
Sanchez, J.L.
Xu, B.
Osipowicz, T. 
Watt, F. 
Issue Date: 2-Sep-1999
Source: Van Kan, J.A., Sanchez, J.L., Xu, B., Osipowicz, T., Watt, F. (1999-09-02). Resist materials for proton micromachining. Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 158 (1) : 179-184. ScholarBank@NUS Repository. https://doi.org/10.1016/S0168-583X(99)00392-4
Abstract: The production of high aspect ratio microstructures is a potential growth area. The combination of deep X-ray lithography with electroforming and micromolding (i.e. LIGA) is one of the main techniques used to produce 3D microstructures. The new technique of proton micromachining employs focused MeV protons in a direct write process which is complementary to LIGA, e.g. micromachining with 2 MeV protons results in microstructures with a height of 63 μm and lateral sub-micrometer resolution in PMMA resist. The aim of this paper is to investigate the capabilities of proton micromachining as a lithographic technique. This involves the study of different types of resists. The dose distribution of high molecular weight PMMA is compared with three other types of resist: First the positive photo resist AZ P4620 will be discussed and then PMGI SF 23, which can be used as a deep UV, e-beam or X-ray resist. Finally SU-8, a new deep UV negative type of chemically amplified resist will be discussed. All these polymers are applied using the spin coating technique at thicknesses of between 1 and 36 μm.
Source Title: Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
URI: http://scholarbank.nus.edu.sg/handle/10635/97808
ISSN: 0168583X
DOI: 10.1016/S0168-583X(99)00392-4
Appears in Collections:Staff Publications

Show full item record
Files in This Item:
There are no files associated with this item.

SCOPUSTM   
Citations

62
checked on Apr 24, 2018

WEB OF SCIENCETM
Citations

61
checked on Apr 24, 2018

Page view(s)

23
checked on Feb 25, 2018

Google ScholarTM

Check

Altmetric


Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.