Please use this identifier to cite or link to this item: https://doi.org/10.1143/JJAP.47.8600
Title: Realization and simulation of high-aspect-ratio micro/nanostructures by proton beam writing
Authors: Valamontes, E.
Chatzichristidi, M.
Tsikrikas, N.
Goustouridis, D.
Raptis, I.
Potiriadis, C.
Van Kan, J.A. 
Watt, F. 
Keywords: High-aspect-ratio
Lithography
Proton beam writing
Resist stripping
Issue Date: 14-Nov-2008
Citation: Valamontes, E., Chatzichristidi, M., Tsikrikas, N., Goustouridis, D., Raptis, I., Potiriadis, C., Van Kan, J.A., Watt, F. (2008-11-14). Realization and simulation of high-aspect-ratio micro/nanostructures by proton beam writing. Japanese Journal of Applied Physics 47 (11) : 8600-8605. ScholarBank@NUS Repository. https://doi.org/10.1143/JJAP.47.8600
Abstract: Among the patterning technologies proposed and applied for the realization of high-aspect-ratio structures in the micro- and nanoscale, proton beam writing (PBW) is considered to be a valuable tool for maskless patterning of such structures owing to the unique ability of protons to maintain a straight path over long distances. In this work, the PBW capabilities are demonstrated through simulation results of fine structures in resist films. These results prove the capability of PBW to produce very tall structures with almost vertical sidewalls, with the aspect ratio limited practically only by the resist performance and the beam diameter provided. The performance of PBW is explored and proved through the patterning of an aqueous base developable negative chemically amplified resist (TADEP, thick aqueous base developable epoxy based resist). By employing PBW on a 2.0-μm-thick TADEP, patterns with 110nm linewidth and an aspect ratio of 18 were resolved. © 2008 The Japan Society of Applied Physics.
Source Title: Japanese Journal of Applied Physics
URI: http://scholarbank.nus.edu.sg/handle/10635/97767
ISSN: 00214922
DOI: 10.1143/JJAP.47.8600
Appears in Collections:Staff Publications

Show full item record
Files in This Item:
There are no files associated with this item.

SCOPUSTM   
Citations

4
checked on Sep 17, 2018

WEB OF SCIENCETM
Citations

4
checked on Sep 17, 2018

Page view(s)

27
checked on Feb 25, 2018

Google ScholarTM

Check

Altmetric


Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.