Please use this identifier to cite or link to this item: https://doi.org/10.1016/j.nimb.2007.02.064
Title: Polymer microlens replication by Nanoimprint Lithography using proton beam fabricated Ni stamp
Authors: Dutta, R.K. 
van Kan, J.A. 
Bettiol, A.A. 
Watt, F. 
Keywords: Electroplating
Microlens array
Nanoimprinting Lithography
PMGI resist
Proton beam writing
Issue Date: Jul-2007
Source: Dutta, R.K., van Kan, J.A., Bettiol, A.A., Watt, F. (2007-07). Polymer microlens replication by Nanoimprint Lithography using proton beam fabricated Ni stamp. Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 260 (1) : 464-467. ScholarBank@NUS Repository. https://doi.org/10.1016/j.nimb.2007.02.064
Abstract: It is essential to have a simplified and a rapid method for fabricating micro/nano structures in different kinds of polymeric materials. Though it is possible to fabricate arrays of microlens directly by P beam writing (PBW), it is restricted to a few types of resist materials. Therefore we have fabricated a Ni electroplated metallic stamp comprising of arrays of inverse/negative features of microlenses. The metallic stamp of about 500 μm thick is made on a silicon wafer coated with 10 μm thick polymethylglutarimide (PMGI) resist and the desired structures are written by PBW followed by thermal reflow and Ni electroplating. An array of microlenses is imprinted on a polycarbonate (PC) substrate by the Nanoimprint Lithography (NIL) technique and the replicated microlenses featuring various numerical apertures, diameters and pitches are characterized. © 2007 Elsevier B.V. All rights reserved.
Source Title: Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
URI: http://scholarbank.nus.edu.sg/handle/10635/97567
ISSN: 0168583X
DOI: 10.1016/j.nimb.2007.02.064
Appears in Collections:Staff Publications

Show full item record
Files in This Item:
There are no files associated with this item.

SCOPUSTM   
Citations

21
checked on Apr 18, 2018

WEB OF SCIENCETM
Citations

17
checked on Apr 18, 2018

Page view(s)

45
checked on Mar 12, 2018

Google ScholarTM

Check

Altmetric


Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.