Please use this identifier to cite or link to this item: https://doi.org/10.1088/0960-1317/14/2/020
Title: Polymer micro piezo valve with a small dead volume
Authors: Shao, P. 
Rummler, Z.
Schomburg, W.K.
Issue Date: Feb-2004
Citation: Shao, P., Rummler, Z., Schomburg, W.K. (2004-02). Polymer micro piezo valve with a small dead volume. Journal of Micromechanics and Microengineering 14 (2) : 305-309. ScholarBank@NUS Repository. https://doi.org/10.1088/0960-1317/14/2/020
Abstract: A polymer valve with a small dead volume in the range of 6 nl and a response time faster than 1 ms is presented. The valve structure is simple and therefore easy to fabricate by injection molding or hot embossing. A layer of silicone rubber applied by a stamping technique not only promotes the sealing of the valve but also defines the gluing area during assembly. The fabrication is based on the AMANDA-process, which allows low-cost batch production of polymer micro devices.
Source Title: Journal of Micromechanics and Microengineering
URI: http://scholarbank.nus.edu.sg/handle/10635/97566
ISSN: 09601317
DOI: 10.1088/0960-1317/14/2/020
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